Our target is to achieve net zero emissions across our value chain by 2040.
The growing demand for enhanced chip functionality means that the complexity and energy consumption of the overall microchip patterning process is increasing.
Aiming for net zero greenhouse gas emissions across our entire value chain by 2040 is a complex challenge that can only be achieved by working closely with our partners, suppliers, customers and other stakeholders. We are one of the founding members of the Semiconductor Climate Consortium, which focuses on speeding up industry value chain efforts to reduce greenhouse gas emissions.
Bird's eye view of solar panel installation at our Veldhoven campus. 
Toward net-zero emissions
Our approach to achieving net zero emissions in our value chain by 2040 is based on three principles:
- Reduce energy use and innovate to achieve greater energy efficiency by redesigning our assets, products and processes.
- Aim to lead the shift toward 100% credible, renewable energy.
- Compensate for residual emissions if no reasonable other improvement actions are available.
As part of our journey to net zero emissions, we are a signatory to the Science Based Targets initiative (SBTi) and we currently have two SBTi-approved near-term targets. These are:
- Reduction of 25.2% of our combined scope 1 and 2 emissions in 2025, compared to base year 2019, without offsetting
- Reduction of 35.3% in scope 3 intensity (emissions per unit of gross profit) in 2025 compared to 2019, without offsetting
Our operations (scope 1 and scope 2): Net zero by 2025
We aim to achieve our target by reducing energy consumption across our operations (buildings and manufacturing), using renewable energy and compensating CO2 emissions.
Business travel and commuting (scope 3): Net zero by 2025
We’re focused on developing sustainable business travel and commuting options and working with employees to encourage, incentivize and support changing commuting habits.
Our supply chain (scope 3): Net zero by 2030
We depend on our suppliers and other upstream value chain partners to work with us to jointly reduce our carbon footprint. Through our Sourcing & Procurement ESG sustainability program we’re actively engaging and collaborating with suppliers to drive further progress.
Product use at customer sites (scope 3): Net zero by 2040
When we design new systems, we increasingly focus on reducing energy consumption and cost, while increasing performance and availability. The EUV light source is the key focus of our current engineering efforts, because it accounts for the largest portion of an EUV system’s total energy consumption.
We have adopted sustainable construction standards to manage the environmental impact of our growing campuses. Find out more about our approach and the innovative energy grid at our Veldhoven campus.
2023 performance
Scope 1 & 2 CO₂e emissions
Scope 3 CO₂e emissions
Scope 3 CO₂e emissions intensity
(per €m gross profit)
NXE energy use per wafer pass
(NXE:3600D, measured in 2023)
See our latest annual report for full details of targets and performance data
Our environmental management system
We have an environmental management system (EMS) in place to help us monitor our energy use and emissions, improve performance and enhance efficiency. The EMS is integrated into our Environmental, Health and Safety (EHS) management system. All our facilities operate on the basis of this system, which is ISO 14001 certified and structured in accordance with ISO 45001 requirements.
Sustainability
Our key themes
A sustainability mindset
Meet Ton van der Net, who shares the untold stories behind ASML’s sustainability revolution
