Microchips are made by building up complex patterns of transistors, layer by layer, on a silicon wafer. ASML’s lithography systems are central to that process.
A lithography (more formally known as ‘photolithography’) system is essentially a projection system. Light is projected through a blueprint of the pattern that will be printed (known as a ‘mask’ or ‘reticle’).
With the pattern encoded in the light, the system’s optics shrink and focus the pattern onto a photosensitive silicon wafer. After the pattern is printed, the system moves the wafer slightly and makes another copy on the wafer.
The science behind the chip
![The Rayleigh criterion](https://edge.sitecorecloud.io/asmlnetherlaaea-asmlcom-prd-5369/media/project/asmlcom/asmlcom/asml/images/technology/lithography-principles/40868-experience-center-veldhoven.jpg?h=1281&iar=0&w=1920)
Learn the equation that determines just how small the transistors on a microchip can be.
![Light & lasers](https://edge.sitecorecloud.io/asmlnetherlaaea-asmlcom-prd-5369/media/project/asmlcom/asmlcom/asml/images/technology/47099-asml-lab.jpg?h=1280&iar=0&w=1920)
From visible blue light to invisible extreme UV light, our lithography machines keep innovation in light and lasers moving forward.
![Lenses & mirrors](https://edge.sitecorecloud.io/asmlnetherlaaea-asmlcom-prd-5369/media/project/asmlcom/asmlcom/asml/images/technology/lithography-principles/duv-lens-element.jpg?h=1280&iar=0&w=1920)
The complex optical systems in our lithography machines reduce the image to be printed on a wafer to the nanometer level.
![Mechanics & mechatronics](https://edge.sitecorecloud.io/asmlnetherlaaea-asmlcom-prd-5369/media/project/asmlcom/asmlcom/asml/images/technology/lithography-principles/inside-nxe3400---the-wafer-handler-bringing-a-wafer-into-the-machine_43682.jpg?h=1080&iar=0&w=1920)
Our lithography machines feature some of the world’s most advanced, precision-engineered mechanical and mechatronic systems.