Press release - Veldhoven, the Netherlands, September 2, 2014
ASML Holding NV (ASML) today announces that a second customer has successfully performed an EUV endurance test during which wafer processing capability was proven of around 600 wafers within 24 hours on an NXE:3300B EUV system.
The endurance test was designed to simulate a production run and, similar to an earlier test in July at another customer, exceeded the 500-wafer-per-day requirement that ASML customers have set for the end of the year. ASML president and Chief Executive Officer Peter Wennink told a webcast investor conference in New York today that ASML is encouraged by the result of this second test. However, EUV performance needs to be repeated on multiple days and multiple systems, which is the goal of the availability improvement programs that will be executed throughout the remainder of the year.
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