Mechatronics internship: laser to droplet control

Introduction

In EUV machines a tin droplet is hit by a laser pulse 50k times per second in order to create EUV light. Our group is responsible for positioning this laser within the beam path and on to the tin droplet. For this purpose, we use extremely fast light sensors and (electro-mechanical) actuators running at extreme bandwidths.

Your assignment

A perfect alignment between the laser and the droplet results in the largest amount of EUV. Therefore, we continuously strive for a lower laser to droplet error. For this reason, we have two internship assignments available for two interns:

Assignment 1: HIGS Control for EUV Source
This laser to droplet error is disturbed by many elements and to compensate for these effects we measure the laser and droplet position and apply position feedback using tip/tilt mirror actuators. The goal of the assignment is to investigate whether a more advanced control scheme, Hybrid integrator-gain systems (HIGS) specifically, can further suppress disturbances and reduce the laser to droplet error. 

Some of your tasks include:

• Become familiar with the operation of an EUV source and specifically the laser beam steering control techniques;

• Become familiar with HIGS control schemes;

• Implement a HIGS control scheme in a model and simulate performance impact;

• Implement a HIGS control scheme in the control network and perform measurements to evaluate impact (optional);

• Give advice on the way forward regarding HIGS control.

Assignment 2: EUV Source Settling Observer

Upon the start of EUV light generation, a settling effect is observed. To allow for this settling, the light generation is started well before the die exposure, there is a significant energy saving potential if the settling time can be reduced. The task of this internship is to predict and compensate for this settling behavior and thereby reduce the amount of settling time needed.

Some of your tasks include:

• Become familiar with the operation of an EUV source and specifically the laser beam steering control techniques;

• Create an understanding of this settling mechanism and its physics;

• Design a compensation mechanism to reduce the settling behavior using iterative learning control (ILC) techniques;

• Simulate the impact of this compensation mechanism;

• Give advice on the way forward regarding this compensation mechanism.

Both of these assignments are suitable for a Master apprentice internship (non-thesis) with a duration of 3 to 6 months, working 4-5 days a week. The start date is around September 2025.
 

Your profile

To be a match for this internship, you:

• Are busy with your master's in Mechatronics, Mechanical Engineering, or Electrical Engineering, specializing in Control Systems;

• Are able to analyze data and utilize tooling like MATLAB and Simulink (a must);

• Possess some experience with system identification, modelling, and controller design;

• Are solution oriented and have attention to detail and a hands-on mentality;

• Have good communication skills in English (verbal and written).

Other requirements you need to meet:

• You are enrolled at an educational institute for the entire duration of the internship;

• You are located in the Netherlands to perform your internship. In case you are currently living/studying outside of the Netherlands, your CV/motivation letter includes the willingness to relocate;

• If you are a non-EU citizen, studying in the Netherlands, your university is willing to sign the documents relevant for doing an internship (i.e., Nuffic agreement).

This position requires access to controlled technology, as defined in the United States Export Administration Regulations (15 C.F.R. § 730, et seq.). Qualified candidates must be legally authorized to access such controlled technology prior to beginning work. Business demands may require ASML to proceed with candidates who are immediately eligible to access controlled technology.

Diversity and inclusion

ASML is an Equal Opportunity Employer that values and respects the importance of a diverse and inclusive workforce. It is the policy of the company to recruit, hire, train and promote persons in all job titles without regard to race, color, religion, sex, age, national origin, veteran status, disability, sexual orientation, or gender identity. We recognize that diversity and inclusion is a driving force in the success of our company.

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