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Circular economy

Minimizing waste, maximizing resources

By 2030, we aim to send zero waste from operations to landfill or incineration.

We aim to maximize the value of our systems, reusing resources as much as possible, while minimizing waste, decoupling our growth from resource consumption, and recycling materials.


Through our circular economy approach, we aim to ensure our products and services retain and create as much value as possible for us and our partners in the ecosystem.

Our circular economy approachA successful transition toward a circular economy means improved designs, operational resilience, reduced emissions and reduced costs. Our approach to achieve this is designing products for longevity and reuse, creating closed-loop supply chains and encouraging the recycling of materials.

Our strategy includes the following principles:


  • Prevent waste from our assets, systems and processes by redesigning them, in collaboration with our suppliers and customers, to limit their environmental impact


  • Extend the lifetime and productivity of our systems and assets to maximize their usage throughout their life cycles


  • Reuse resources, parts, tools, packaging and goods across the value chain


  • Recycle materials if we can no longer apply any of the previous principles, avoiding incineration and landfill


Prevent waste

We are rethinking and redesigning systems and processes to avoid waste, focusing on design, sourcing and quality, We design our systems to last for as long as possible, using feedback loops to learn from failure modes and repair activities to continuously improve.

We work with suppliers to increase our use of recycled materials which can be upgraded, refurbished, repaired and recycled. A dedicated team enables us to take a sustainable packaging approach while also ensuring the safe transport of our systems. 

Extend lifetime

A well-maintained ASML system can last for decades and create value for more than one customer. We aim to keep systems in use as long as economically and environmentally possible, focusing on service, upgrades and refurbishment of assets, systems and goods.

Our refurbished products business refurbishes and upgrades our older lithography systems to a higher performance level to extend their lives. We guarantee the availability of spare parts for as long as possible. 

Reuse resources

We‘re committed to reusing parts, packaging and tools across the value chain, focusing on return, recondition and repurposing processes. We optimize return flows by collaborating with customers and suppliers, while learning from system usage and product returns.


We recondition parts and packaging through global and local repair centers, suppliers and partners, at the best location with the lowest environmental impact.

Recycle materials

Recycling our waste plays a key role in closing the material loop. We aim to recycle materials instead of incinerating or disposing of them to landfill. 


We’re focusing on collection, analysis and reporting processes to identify drivers of waste and gain insights into reasons for disposal, providing feedback to prevent waste and improve opportunities for recycling. 


We aim to maximize waste separation at our sites to enable increased recycling rates and easy recycling at the waste haulers'.

Designing for circularity

How ASML embeds sustainability principles into products

An illustration of a man and a woman joining two halves of a link in an infinity chain.

2023 performance

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Systems still active in the field

(of total sold in the past 30 years)

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Reuse rate

(of parts returned from field and factory)

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Total waste from operations

(excluding construction)

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Recycling rate

(excluding construction)

See our latest annual report for full details of targets and performance data

Find out more about our sustainability strategy